A series of alsohols with perfluroinated segments F(CF₂)_m(CH₂)_n+2-OH, with m-8, 10 and n=2, 4, 8, was synthesized. The alcohols were converted to triethoxysilylpropyl urethanes by a condensation reaction, and characterized by FT-IR spectrum. In the presence of moisture, the triethoxysilylpropyl urethanes undergo hydrolysis and condensation to yield heavily crosslinked matrixes. Films cast in this manner and cured at 150℃ in air are thermally stable. The water contact angles of the spin-coated films onto glass were ranged from 110°to 120°depend on the numbers of fluorocarbon units and the hydrolysis times. Also, the water contact angles of the coated films after 3 months were similar to that of the initial coated films.