Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.14, No.21, 1531-1533, 1995 DOI10.1007/BF00633152 Export Citation T1-Xalxn Coatings by Plasma-Assisted Chemical-Vapor-Deposition Using a TiCl4/AlCl3/N-2/H-2/Ar Gas-Mixture Kim KH, Lee SH Keywords:ION PLATING METHOD;FILMS;TI Please enable JavaScript to view the comments powered by Disqus.
