We investigated the hydrogen passivation effect on the conversion efficiency of Si solar cells by including low-energy hydrogen ion implantation in the cell fabrication process. The solar cells were implanted with various proton energies and doses just before the co-firing process. The quantum efficiency specifically in the blue wavelengths of the solar cells increased with a low implantation dose and energy indicating improvement of surface passivation. However, quantum efficiency decreased when the implantation dose and energy were increased, indicating a high defect-assisted surface recombination of minority carriers. The cells implanted with a low dose and energy in the presence of SiNx showed interfacial passivation with enhanced photocurrent, minority carrier lifetime and short-circuit current density for improved conversion efficiency. (C) 2015 Elsevier Ltd. All rights reserved.