For practical applications of the oxygen-containing yttrium hydride-based photochromic films, knowledge about deposition on substrates of different types and sizes is an important issue. In this article, we report on the dynamic reactive sputter deposition of the films on small and large-area glass and plastic substrates. By analysis of the optical properties we show that all the deposited films exhibited photochromic effect. Surface morphology and structural properties of the films have been studied. (C) 2014 Elsevier B.V. All rights reserved.