화학공학소재연구정보센터
Journal of Materials Science Letters, Vol.15, No.13, 1169-1171, 1996
Deposition of Surface-Layers by the LPCVD Process Conducted in a TiCl4-H-2-N-2 Atmosphere - Contribution of the Carbon Contained in the Steel Substrate and of Total Pressure of the Gaseous Atmosphere