화학공학소재연구정보센터
Thin Solid Films, Vol.591, 18-24, 2015
Influence of film thickness on structural, optical, and electrical properties of spray deposited antimony doped SnO2 thin films
Transparent conducting antimony doped SnO2 thin films with varying thickness were deposited by chemical spray pyrolysis technique from non-aqueous solvent Propan-2-ol. The effect of film thickness on the properties of antimony doped SnO2 thin films have been studied. X-ray diffraction measurements showed tetragonal crystal structure of as-deposited antimony doped SnO2 films irrespective of film thickness. The surface morphology of antimony doped SnO2 thin film is spherical with the continuous distribution of grains. Electrical and optical properties were investigated by Hall Effect and optical measurements. The average optical transmittance of films decreased from 89% to 73% within the visible range (350-850 nm) with increase in film thickness. The minimum value of sheet resistance observed is 4.81 Omega/cm(2). The lowest resistivity found is 3.76 x 10(-4) Omega cm at 660 nm film thickness. (C) 2015 Elsevier B.V. All rights reserved.