화학공학소재연구정보센터
Thin Solid Films, Vol.594, 287-292, 2015
Effect of solution composition on anatase to rutile transformation of sprayed TiO2 thin films
Acetylacetone is used as a chelating agent for titanium(IV) isopropoxide to inhibit hydrolysis and stabilize the precursor solution. The effect of the molar ratio between titanium(IV) isopropoxide and acetylacetone of 1:1, 1:2, 1:3 and 1:4 in the precursor solution on the morphological, structural and optical properties of TiO2 thin film was investigated. These properties were studied using Fourier transformed infrared spectroscopy, scanning electron microscopy, Raman spectroscopy, X-ray diffraction and UV-vis spectroscopy as a function of the molar ratios for the as-deposited thin films and films annealed at temperatures of 700, 800 and 950 degrees C. Mixed anatase and rutile phases were detected after annealing at 800 degrees C for 1:1 and 1:2 molar ratios and at 700 degrees C for 1:3 and 1:4 molar ratios. The optical band gap decreased from 3.45 to 3.02 eV with an increase in the annealing temperature in agreement with corresponding structural changes. (C) 2015 Elsevier B.V. All rights reserved.