Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.15, No.17, 1495-1497, 1996 DOI10.1007/BF00625002 Export Citation Effect of Deposition Conditions on the Physical and Electrical-Properties of Reactive Sputtered Molybdenum Nitride Film Lee JY, Jeon SR, Park JW Keywords:BARRIER LAYERS Please enable JavaScript to view the comments powered by Disqus.
