In this study, we prepared ZnO-based thin films-AZO, GZO and GAZO for OLED anode by facing targets sputtering (FTS) system. The reason of the used ZnO-based thin films is that it can be prepared to obtain high transparency in the visible range, low resistivity, stability of chemical and stability in hydrogen plasma by added materials such as Al, Ga. The electrical and optical properties of the as-doped AZO, GZO and GAZO thin films were evaluated with UV/VIS spectrometer, 4-point prove, XRD, AFM, FESEM. And the performance of the OLED device such as the operating voltage and its efficiency were evaluated by J-V-L (current density-voltage-luminance) measurements