Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.16, No.21, 1718-1720, 1997 DOI10.1023/A:1018507021453 Export Citation Chemical and Mechanical Polishing Effects on Capacitance-Voltage Curve Recovery of MOS Capacitors Passivated with Alf3-Geo2-B2O3 Glasses Exposed to Water-Vapor Kobayashi K Keywords:POINTS;FILMS Please enable JavaScript to view the comments powered by Disqus.
