Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.16, No.23, 1910-1913, 1997 DOI10.1023/A:1018530515944 Export Citation Structure of ion-beam-deposited B-C-N-O films and the role of oxygen Zhao XA, Ong CW, Ng YM, Chan KF, Tsang YC, Choy CL, Chan PW, Kwok RWM Keywords:CHEMICAL-VAPOR-DEPOSITION;CUBIC BORON-NITRIDE;BC2N THIN-FILMS;CARBON;NITROGEN Please enable JavaScript to view the comments powered by Disqus.
