화학공학소재연구정보센터
Advanced Materials, Vol.27, No.33, 4858-4864, 2015
Growth and Etching of Monolayer Hexagonal Boron Nitride
The full spectrum from attachment-kinetic-dominated to diffusion-controlled modes is revealed for the cases of monolayer h-BN chemical vapor deposition (CVD) growth and Ar/H-2 etching. The sets of grown and etched structures exhibit well-defined shape evolution from Euclidian to fractal geometry. The detailed abnormal processes for merging h-BN flakes into continuous structures or film are first observed and explained.