Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.18, No.17, 1427-1431, 1999 DOI10.1023/A:1006679625601 Export Citation Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors Cha CL, Chor EF, Jia YM, Bourdillon AJ, Gong H, Pan JS, Zhang AQ, Tang SK, Boothroyd CB Keywords:BREAKDOWN;GATE;ONO Please enable JavaScript to view the comments powered by Disqus.
