Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.18, No.17, 1437-1439, 1999 DOI10.1023/A:1006683726509 Export Citation Spin-on-polymer methylsilsesquioxane for sub-micron intermetal dielectric application Chua CT, Sarkar G, Chooi SYM, Chan L [Referenced By] Please enable JavaScript to view the comments powered by Disqus.
