화학공학소재연구정보센터
Chemistry Letters, Vol.44, No.6, 794-796, 2015
An N-2-compatible Ni-0 Metal-Organic Chemical Vapor Deposition (MOCVD) Precursor
We report the first example of a Ni-0 precursor that provides a contamination-free (<1%) nickel film by metal-organic chemical vapor deposition (MOCVD) using N-2 as the carrier gas. The structure and physical properties of the Ni-0 precursor and subsequent film are described.