A silicon substrate with bio-inspired micro-nanoscale structure has been fabricated by wet etching, which is used as TiO2 particles supporting substrate and makes them recovery more easily. It has been shown that the structure facilitates TiO2 with large surface area and suppresses light reflection more effectively, which results in a high photocatalytic performance. The photocatalytic and stable performance has been applied on degrading methyl orange (MO). (C) 2016 Elsevier Inc. All rights reserved.