- Previous Article
- Next Article
- Table of Contents
Journal of Vacuum Science & Technology B, Vol.28, No.6, C6D5-C6D10, 2010
Fabrication of metal patterns on freestanding graphenoid nanomembranes
Metallic patterns on freestanding ultrathin supports are desirable for many applications in modern optics or nanomechanics. The authors present four fabrication paths to create gold patterns that are supported by 1 nm thick freestanding graphenoid nanomembranes from self-assembled monolayers. Two fabrication schemes apply resist based lithographic processes to define gold structures on nanosheets. The gold/nanomembrane hybrids are then released from their substrates to form a freestanding structure. In two further fabrication schemes, the direct metal deposition of metal onto a freestanding graphenoid is performed. All four schemes are capable of producing gold patterns on two-dimensional nanomaterials, thus resembling new paths for the routine fabrication of free-floating metallic structures. (c) 2010 American Vacuum Society. [DOI: 10.1116/1.3511475]