In this study, the effect of oxygen plasma treatment on the electrical and surface properties of polyimide, Kapton HN, film is investigated. The plasma treatment led to an increase in the oxygen presence on the polyimide surface and a marked surface hydrophilicity. The plasma treatment led to an increase in the dielectric breakdown and Weibull modulus as well as a remarkable reduction in the scatter of all electrical measurements. There is a significant reduction in the high field/high temperature leakage current after plasma treatment. These findings have important implications in the development and improvement of dielectric polymer capacitors. (C) 2016 Elsevier B.V. All rights reserved.