Chemical modifications of B4C cap layers on sputtered Pd/B4C multilayer coatings for X-ray optical applications were investigated using X-ray reflectivity, photoemission electron spectroscopy, photoemission electron microscopy, transmission electron microscopy, energy dispersive X-ray spectroscopy, and infrared spectroscopy. The results indicate oxidation down to probing depths of about 10 nm and strong evidence for the formation of B2O3 crystals at the sample surface, while B4C like compounds are absent. (C) 2016 Elsevier B.V. All rights reserved.