화학공학소재연구정보센터
Materials Research Bulletin, Vol.79, 84-89, 2016
Preparation and luminescence properties of patterned SOG/Sr2MgSi2O7:Eu2+, Dy3+ long-persistent luminescence composite thin films by one-step photolithography
In this paper, patterned photosensitive silicon-organic hybrid glass material/Sr2MgSi2O7:Eu2+, Dy3+ (SOG/SMS) long persistent luminescence composite films with lines (widths 50 mu m and 250 mu m), dots (50 mu m) and holes (50 mu m) patterns on silicon wafer were fabricated by one-step photolithography. SMS particles were first synthesized by sol-gel method and their structure was analyzed by XRD. Patterned SOG/SMS composite films containing 5 wt% of SMS particles were then fabricated by one-step photolithography. SEM, fluorescent microscope and spectrofluorophotometer were used for the characterization of the patterned SOG/SMS composite films. It was found that the obtained patterns are of good shapes and order. The fluorescent emission band of the composite films shows a major peak at 468 nm. Decay curves of the composite films have a similar tendency with that of the pure SMS particles, except for slightly lower intensity for the former. (C) 2016 Elsevier Ltd. All rights reserved.t