In this work sol-gel process for preparation of the uniform hybrid silica-3-aminopropyltriethoxysilane (APTES) coatings on glass surface is presented from mechanistic point of view. The suggested synthetic approach is straightforward, scalable and provides the means to tune the amount of amino groups on the surface simply by changing concentration of APTES in the initial sol. Deposition rate of different size silver nanoprisms (AgNPRs) on hybrid silica coatings of various amounts of APTES were studied and their performance as SERS materials were probed. The acquired data shows that the deposition rate of AgNPRs can be tuned by changing the amount of APTES. The optimal amount of APTES was found to be crucial for successful AgNPRs assembly and subsequent uniformity of the final SERS substrate too high APTES content may result in rapid non-stable aggregation and non-uniform assembly process. SERS study revealed that SERS enhancement is the strongest at moderate AgNPRs aggregation level whereas it significantly drops at high aggregation levels. (C) 2016 Elsevier B.V. All rights reserved.