Cu incorporated TiO2 has been regarded as a low-cost photocatalyst with excellent photocatalytic performance for water splitting. Here we try to exploit the origin of its high reactivity by fabricating a series of Cu incorporated TiO2 films with the same Cu content under different atmosphere. Based on the comprehensive structure and surface characterizations, it is found that CuO is unstable and will be reduced to Cu2O or even to metallic Cu under light irradiation during the photocatalytic reaction, and Cu2O is an efficient co-catalyst that promotes the separation of photogenerated carriers while metallic Cu can further boost the photocatalytic activity. Besides, it is also noticed that the chemisorbed oxygen on the particle surface blocks the water splitting. By depositing TiO2 films under oxygen rich condition, oxygen vacancy is decreased greatly, which facilitates the removal of chemisorbed oxygen and the formation of metallic Cu during photocatalytic reaction, resulting in an ultra-high H-2 evolution rate of 2.80 pinol cm(-2) h(-1), which is about 55 times higher than that of pure TiO2. (C) 2016 Elsevier B.V. All rights reserved.