Effect of radius of gyration on polymer deformation for thermal nanoimprint lithography

Sung Nam Moon; Dong Eon Lee; Seung Mo Kim; Woo Il Lee

Macromolecular Research, Vol.24, No.9, 847-850, September, 2016

DOI10.1007/s13233-016-4108-3 Export Citation

Effect of radius of gyration on polymer deformation for thermal nanoimprint lithography

Sung Nam Moon, Dong Eon Lee, Seung Mo Kim^{1, †}, and Woo Il Lee^†

School of Mechanical and Aerospace Engineering, Seoul National University, Seoul, 08826, Korea
¹School of Mechanical Engineering, Korea University of Technology and Education, Cheonan-si, Chungnam, 31253, Korea

E-mail:,

Nano-Scale deformation of the entangled polymer chains is investigated by thermal nano-imprint lithography (T-NIL) experiment. The polystyrene films of different molecular weights with uniform thickness (~1.5 μm) are used. The experimental results show that the Rg value of a polymer chain which is affected by previous solvent state gives the lower limit of a processable pattern size in an low-pressure molding process.

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[1] Chou SY, Krauss PR, Renstrom PJ, J. Vac. Sci. Technol. B, 14(6), 4129 (1996)

[2] Guo LJ, Adv. Mater., 19(4), 495 (2007)

[3] Schift H, Kristensen A, in Springer Handbook of Nanotechnology, Bhushan B, Eds., Springer Berlin Heidelberg, 2010, pp 271-312.

[4] Chou SY, Krauss PR, Microelectron. Eng., 35, 237 (1997)

[5] Guo LJ, J. Phys. D-Appl. Phys., 37, R123 (2004)

[6] Lee GT, Yoon BK, Acharya H, Park CM, Huh J, Macromol. Res., 17(3), 181 (2009)

[7] Harry DR, Amy CS, Schunk PR, William PK, J. Micromech. Microeng., 15, 2414 (2005)

[8] Zankovych S, Hoffmann T, Seekamp J, Bruch JU, Torres CMS, Nanotechnology, 12, 91 (2001)

[9] Soles CL, Ding Y, Science, 322, 689 (2008)

[10] Rowland HD, King WP, Pethica JB, Cross GLW, Science, 322, 720 (2008)

[11] Shin K, Obukhov S, Chen JT, Huh J, Hwang Y, Mok S, Dobriyal P, Thiyagarajan P, Russell TP, Nat. Mater., 6(12), 961 (2007)

[12] Hu HW, Granick S, Science, 258, 1339 (1992)

[13] Kim SP, Lee DE, Lee WI, Tribol. Lett., 49, 421 (2013)

[14] Terao K, Mays JW, Eur. Polym. J., 40, 1623 (2004)

[15] Kniewske R, Kulicke WM, Macromol. Chem. Phys., 184, 2173 (1983)

[16] Roth CB, Dutcher JR, J. Electroanal. Chem., 584(1), 13 (2005)