The fabrication of oxide patterns on titanium (Ti), with a spatial resolution of 20 nm, was accomplished by the use of a scanning tunneling microscope (STM) through applying a positive sample bias (V-s) voltage of +3.0 to +8.0 V in the presence of adsorbed water on Ti. The fabricated patterns were observed as swelled structures in the STM images acquired at V-s = -3.0 V. Surface swelling was induced only when V-s was set positively, and the height of the oxide layer increased with increasing V-s, which suggested that the pattern formation was attributed to electrochemical oxidation of Ti; anodization of Ti with adsorbed water. The role of the faradaic current flows during STM tip-induced anodization for tip control is also discussed in terms of a scanning electrochemical microscope.