A two-step electrochemical formation of nanoporous zirconium oxide layers on different zirconium foils (purity 99.2% and 99.8%) was investigated. Anodizations were carried out at 20 V in an electrolyte composed of 1 M (NH4)(2)SO4 and 0.15 M NH4F. It was found that the thickness of grown oxide layer, and consequently, the rate of oxide formation depend slightly on the Zr substrate purity. The pore nucleation and anodization process occur easier in the presence of higher concentration of impurities. From top view SEM images, the structural parameters of oxide layers such as pore diameter, interpore distance, pore density, wall thickness and porosity of anodic oxide layers were estimated for both types of used substrates. On the other hand, cell size, intercell distance and cell density were evaluated from the bottom side of anodic oxide layers. A special emphasis was put on the qualitative analysis of hexagonal arrangement of nanopores and cells. The nanopore and cells arrangements in formed oxides were evaluated using various approaches based on Delaunay triangulations, angular distribution functions (ADFs) and pair distribution functions (PDFs). These results were supported by calculations of percentage of defective pores and cells for both types of used Zr substrates. The use of low purity Zr for anodizing does not affect drastically the morphology of formed nanoporous zirconia and offers a promising perspective to reduce production costs and increase availability of this material. (C) 2016 Elsevier B.V. All rights reserved.