화학공학소재연구정보센터
Applied Surface Science, Vol.390, 346-349, 2016
Time evolution of secondary electron emission and trapped charge accumulation in polyimide film under various primary electron irradiation currents
Time-resolved evolution of secondary electron emission and trapped charge accumulation in polyimide film is investigated during two interval electrons bombardment, derived from the measurement of displacement current and secondary current via a hemispherical detector with the shielded grid. Under various irradiation current, secondary electron yield (SEY sigma) at a certain injected energy decreases exponentially from initial amplitude sigma(0) to self-consistent steady value sigma(infinity) close to 0.93. The time constant tau of charging process is characterized as a function of incident current I-p, and the results indicate that the formula I-p x tau is fitted by a hyperbolical law. The influence of I-p on the amount of trapped charge is studied and no significant change in its saturation value is observed. The evolution of SEY sigma and trapped charge is dependent on incident dose Q(p) but not the incident rate I-p. Furthermore, the trap density and capture cross section are discussed. (C) 2016 Elsevier B.V. All rights reserved.