화학공학소재연구정보센터
Journal of Crystal Growth, Vol.450, 22-27, 2016
AIN interlayer to improve the epitaxial growth of SmN on GaN (0001)
An in situ study of the epitaxial growth of SmN thin films on Ga-polar GaN (0001) templates by molecular beam epitaxy is reported. Using X-ray photoelectron spectroscopy we found that Ga segregates at the surface during the first stages of growth. We showed that the problem related to Ga surface segregation can be simply suppressed by growing a few monolayers of AIN before starting the SmN growth. This results in a significant improvement of the crystallinity of SmN thin films assessed by X-ray diffraction. (C) 2016 Elsevier B.V. All rights reserved.