Molybdenum trioxide (MoO3) nanobelts have been deposited onto the glass substrates using chemical spray pyrolysis (CSP) deposition method. The XRD patterns reveal that films are polycrystalline having an orthorhombic crystal structure. Raman spectra confirm that the films are orthorhombic in phase. The XPS study shows the presence of two well resolved spectral lines of Mo-3d core levels appearing at the binding energy values of 232.82 eV and 235.95 eV corresponding to Mo-3d(5/2) and Mo-3d(3/2), respectively. These binding energy values are assigned to Mo6+ oxidation state of fully oxidized MoO3. The FE-SEM micrographs show the formation of nanobelts-like morphology. The AFM micrographs reveal that the RMS surface roughness increases from 16.5 nm to 17.5 nm with increase in film thickness from 470 nm to 612 nm and then decreases to 16 nm for 633 nm film thickness. The band gap energy is found to be decreased from 3.40 eV to 3.38 eV. To understand the electronic transport phenomenon in MoO3 thin films, dielectric properties are studied. For 612 nm film thickness, the highest NO2 gas response of 68% is obtained at an operating temperature of 200 degrees C for 100 ppm concentration with response and recovery times of 15 s and 150 s, respectively. The lower detection limit is found to be 10 ppm which is half of the immediately dangerous to life or health (IDLH) value of 20 ppm. Finally, NO2 gas sensing mechanism in an orthorhombic MoO3 crystal structure is discussed in detail. (C) 2017 Elsevier B.V.