We investigated the conduction characteristics of plasma-doped Si nanowires (NWs) after various rapid thermal annealing (RTA) times. The plasma doping (PD) process developed a highly-deposited B layer at the NW surface. RTA process controls electrical conductivity by mediating the dopant diffusion from the surface layer. The surface chemical and substitutional states of the B plasma-doped Si NWs were analyzed by x-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. To elucidate the detailed structure of the NWs, we analyzed the change in the optical phonon mode caused by the incorporated B atoms. For this purpose, we examined Fano resonance by the investigation of the asymmetry, line-width, and phonon wavenumber in Raman spectra. The changes in symmetry level of the Raman peak, phonon lifetime, and internal strain were closely related to the number of electrically activated borons, which was drastically increased with RTA time. The change in electrical and optical characterizations related to the doping characteristics of the NWs was investigated using a 4-point probe and terahertz time-domain spectroscopy (THz-TDS). The resistivity of the NWs was 3000 times lower after the annealing process compared to that before the annealing process, which is well consistent with the optical conductivity data. The data provide the potential utility of PD in conformal doping for three-dimensional nanodevices. (C) 2017 Elsevier B.V. All rights reserved.