화학공학소재연구정보센터
Journal of Physical Chemistry, Vol.100, No.41, 16647-16652, 1996
Surface Chemical-Species Investigation by FT-Ir Spectrometry and Surface Modification of a Nanosized Sicn Powder Synthesized via Chemical-Vapor Condensation
The surface of a nanosized silicon carbonitride powder synthesized by chemical vapor condensation from hexamethyldisilazane was analyzed by FT-IR spectrometry. Several chemical species were identified, and their behavior toward probe molecules was studied. Deuterium and methanol additions brought evidence of open pores. A slight oxidation led to pore coalescence and strong modifications in the chemical composition of the first atomic layer even though a complete silica coverage was not reached. Moreover, the SiCN surface further nitrided by ammonia addition at high temperature appeared to have, under those conditions, a behavior different from the silicon carbide surface.