The films of Sb-Te system have been deposited by MOVPE on (0001) Al2O3 substrates with thin ZnTe buffer layers at different temperatures and Te/Sb ratios in the vapor phase. X-ray diffractometry, SEM microscopy, Raman and EDX spectroscopy were used to study as-grown films. The surface morphology and stoichiometry of Sb-Te films strongly depend on Te/Sb ratio in vapor phase. We have deposited the phases of homologous series nsb(2)center dot mSb(2)Te(3) with following stoichiometries: Sb(2)re(3), Sb4Te5, Sb8Te9, Sb10Te9, Sb4Te3, Sb2Te, Sb8Te3, Sb10Te3, Sb16Te3, Sb18Te3 and Sb. Transport properties of Sb2Te3, Sb4Te5, Sb8Te9, Sb4Te3, Sb2Te were evaluated using Van der Pauw technique at 300 K. (C) 2017 Elsevier B.V. All rights reserved.