In this work, we report a detailed study of the post-deposition thermal processing and material properties of Sb2S3 thin films deposited by thermal evaporation under vacuum. The effect of the annealing temperature on the structural, morphological, optical, opto-electronic, spectroscopic, and electrical properties of the films was investigated using various tools such as XRD, AFM, UV-vis spectroscopy, Raman spectroscopy, Ellipsometry, photoconductivity, Seebeck effect, and Kelvin probe. The annealing temperature had an interesting influence on the grain growth, and morphology of the films; in a small temperature window of 10 degrees C, the change in grain size and shape was striking. The annealing temperature of 325 degrees C was identified as a critical point at which the grain size is smallest and the morphology is exceptionally homogeneous. Two highly noticeable features were the change in morphology and photosensibility. The photosensibility increased from 0.6 for the as-deposited film to 132 after annealing at 400 degrees C. (C) 2017 Elsevier Ltd. All rights reserved.