Cobalt-doped ZnO (CZO) thin films have been deposited from CoxZn1-xO (x = 0.20) target on Si (100) substrate by pulsed electron beam ablation (PEBA). The effects of process temperature (350 degrees C-800 degrees C) and electron beam acceleration voltage (15 kV, 16 kV) on the deposited films have been assessed. The films have been prepared at constant beam pulse frequency (2 Hz) and Argon background pressure (similar to 3 mTorr). The structure and surface morphology of CZO films have been investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM). As per SEM data, the results show that the films consist of Co rich nano-sized globules (similar to 20 nm-300 nm). Energy dispersive x-ray (EDX) measurements reveal that Co content in the films seems to be unaffected by accelerating voltage while it increases with temperature in the range 350 degrees C-450 degrees C. At higher deposition temperatures (600 degrees C & 800 degrees C), the films exhibit faceted particles and are relatively rough. The films deposited at 800 degrees C consist of a predominantly Co phase. X-ray photoelectron spectroscopy (XPS) data confirm the presence of metallic cobalt in the films, whose content increases with temperature but is practically unaffected by beam voltage. X-ray diffraction (XRD) analysis confirms the presence of herxagonal close-packed (hcp) metallic cobalt in the films. (C) 2017 Elsevier B.V. All rights reserved.