Silane has found recent applications in the manufacture of solar photovoltaic cells, which provide solar power economically. One method for the production of silane takes trichlorosilane as a starting molecule, with a reaction mechanism that involves two other intermediate valuable products, dichlorosilane and monochlorsilane. The production system involves a series of reactors and separation steps that can be intensified via reactive distillation. In this work, optimal designs of reactive distillation systems for the production of trichlorosilane, dichlorosilane and silane are developed. Furthermore, a multi-product reactive distillation system for the production of any of these types of silane products is designed. It is shown that an intensified design can be obtained for the production of the three silane products using the same column. The operating conditions at which the columns should be adjusted for the production of each product are reported. (C) 2017 Elsevier Ltd. All rights reserved.