Silicon is a promising electrode material for photoelectrochemical and photocatalytic reactions. However, the chemically active surface of silicon will be easily oxidized when exposed to the oxidation environment. We immobilized graphene oxide (GO) onto hydrogen-terminated silicon (H-Si) and reduced it through ultraviolet (UV) and vacuum-ultraviolet (VUV) irradiation. This acted as an ultrathin conductive layer to protect H-Si from oxidation. The elemental evolution of GO was studied by X-ray photoelectron spectroscopy, and it was found that GO was partially reduced soon after the deposition onto H-Si and further reduced after UV or VUV light irradiation. The VUV photoreduction demonstrated ca. 100 times higher efficiency compared to the UV reduction based on the irradiation dose. The saturated oxygen-to-carbon ratio (R-O/C) of the reduced graphene oxide (rGO) was 0.21 +/- 0.01, which is lower than the photoreduction of GO on SiO2 substrate. This indicated the H-Si played an important role in assisting the photoreduction of GO. No obvious exfoliation of rGO was observed after sonicating the rGO-covered H-Si sample in water, which indicated rGO was immobilized on H-Si. The electrical conductivity of H-Si surface was maintained in the rGO-covered region while the exposed H-Si region became insulating, which was observed by conductive atomic force microscopy. The rGO was verified capable to protect the active H-Si against the oxidation under an ambient environment.