The alignment of zinc oxide (ZnO) nanostructures is expected to improve device sensitivities due to large surface areas which can be utilized to capture significant quantities of gas particles. In this study, we investigated patterned ZnO nanorods modified with polystyrene monolayers synthesized directly onto a quartz crystal microbalance (QCM) cell to increase the coating surface area of the sensing material. Also, we designed and synthesized a siloxane-based polymer (S1 polymer) as a sensing material. The patterned ZnO nanorods coated with S1 polymers were fabricated and used for the detection of dimethyl methylphosphonate (DMMP). The resonance frequency of QCM was shifted due to the adsorption and desorption of a compound at the surface of the modified electrodes. We have synthesized an S1 polymer that exhibited high sensitivity to DMMP. The patterned ZnO nanorods coated with the polymer also exhibited improved sensitivity due to an enhanced surface area capable of adsorbing more DMMP vapor. (C) 2017 Elsevier B.V. All rights reserved.