High-entropy Al0.5CoCrCuFeNi, Al0.5CoCrCuFeNiSi1.2 and Al0.5CoCrCuFeNiSi2.0 alloy powders were successfully prepared by gas atomization process. All alloy powders have spherical shapes with smooth surfaces. The median particle size distribution D-50 is about 27 mu m for different alloy compositions. With the addition of silicon, the fast cooling rate of gas atomization process reduce segregation, together with the solid solution strengthening effect increases the hardness of powders from 200.5 to 751.8 Hv without reducing the crystallinity of the alloy. The high-entropy alloy powders which prepared by gas atomization process can be potentially used for additive manufacturing applications. (C) 2017 Elsevier B.V. All rights reserved.