A novel method using a chemical vapor deposition (CVD) surface treating method was studied to introduce organic groups, which can be utilized for enzyme immobilization, onto ceramic surfaces. SPCP-CVD is a kind of CVD reaction using surface corona discharge for activation of the reactive gas. Using this method, a CVD reaction which was fed organo silicic compounds could prepare a silica thin film with remaining aminopropyl groups on the ceramic surface. It was shown that the enzyme was immobilized effectively on this remaining organic group by the glutaraldehyde cross-linkage method.