Attachment of cells to substrate surface is the premise for biofilm formation. To shelter microalgae cells from fluid shear stress and offer larger areas for microalgae attachment, the inerratic microgrooves, which can act as anchor points that offer larger areas for microalgae attachment and induce vortex to protect cells from hydraulic shear stress, were designed and fabricated into substrate surface. The results indicated that the shear stress on the surface with V-grooves was weaker than that on the surface with U-grooves, and 45 degrees V-grooves with the width of 200 mu m were benefit for cells attachment. The initial attachment time was shortened to 50 min under the hydraulic shear stress of 0.02 Pa compared to that of 135 min on the surface without microgrooves. Subsequently, the biofilm biomass concentration on the surface with 45 degrees V-grooves increased by 14.29% to 165.84 gm(-2) compared with that on flat substrates.