Journal of Polymer Science Part A: Polymer Chemistry, Vol.35, No.16, 3543-3552, 1997
Photogenerated Base in Polymer Curing and Imaging - Design of Reactive Styrenic Copolymers Susceptible to a Base-Catalyzed Beta-Elimination
A novel family of functionalized styrenic copolymers that are susceptible to a base-catalyzed beta-elimination reaction is reported. The reactive copolymers, poly{(2-phenyl-2-cyanoethoxycarbonyloxystyrene)-co-(4-hydroxystyrene)}, are prepared by chemical modification of poly(4-hydroxystyrene) using 2-phenyl-2-cyanoethyl chloroformate. A photoresist material consisting of the copolymer and bis[[(2-nitrobenzyl)oxy]carbonyl]-4,4’-trimethylenedipiperidine used as an amine photogenerator affords positive tone images by UV irradiation. The effect of copolymer structure and composition on imaging, thermal stability, and the ease of beta-elimination reaction is discussed.
Keywords:POLY(GLYCIDYL METHACRYLATE) FILMS;THERMAL CROSS-LINKING;CHEMICAL AMPLIFICATION;SYSTEMS;AMINES;IMIDIZATION;DERIVATIVES;RESOLUTION;MATRIX