Although layer-by-layer self-assembly (LbLSA) method has gained a great interests by their high oxygen barrier level below 10(-3) cc/m(2)day, theoretical approaches have been limited to analyze the physical properties of the coating layer. In addition, there is a conceptual problem to apply hybrid composite model based on particle distribution because the coating layer is constituted by individually concentrated substances. In this study, oxygen permeability model for LbLSA film was developed by considering the each layer contributions to the oxygen barrier level and compared with the typical models. In particular, it can be demonstrated that the layer contribution model (LCM) is depended on the qualitative factors by numerical analysis for the results of dip coating and spray-assisted spin (SAS) fabrication. As a result, it was confirmed that free volume space and surface density of the inorganic particles are strongly associated with the gas permeability of LbLSA film.