화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.38, No.5, 1063-1080, 2018
A High-Efficiency Double Surface Discharge and Its Application to Ozone Synthesis
Surface discharge with the flat plate configuration tends to generate a uniform and high-density plasma during ozone synthesis, but suffers from relatively low energy yield at high ozone concentration. Here we report that a double surface discharge reactor can produce, at the same input power, two uniform plasma zones that locate two sides of the thin dielectric layer simultaneously, which results in a high ozone energy yield at high ozone concentration. Discharge characteristics confirm that reducing dielectric thickness and discharge gap favors the achievement of high plasma-density and energy efficiency. The optical emission spectroscopy diagnosis suggests that the double surface discharge with thinner dielectric thickness and narrower discharge gap possesses much higher electron density, as well as higher excitation temperature and low rotational temperature, which is responsible for the excellent performance in ozone synthesis. The optimal parameters of 0.25 mm dielectric thickness and 2 mm discharge gap enable ozone synthesis to proceed with an energy yield of 295.2-108.7 g/kWh at ozone concentration of 11.1-48.3 g/Nm(3) and exhibit a good stability during a 4-h test. This performance surpasses the performance of many other typical discharge processes for ozone synthesis.