Using the molecular layering method (ML), nanostructured TiO2 films have been synthesized that are promising for detecting oxygen over a wide range of concentrations at low operating temperatures of 150-300 degrees C. It has been shown that an anatase thin film is formed; the particle size is 34.9 +/- 3.1 nm. It has been established that it enables the highly responsive detection of oxygen (R-O2/R-Ar up to 26.6 at a temperature of 200 degrees C and O-2 content of 10%). The influence of operating temperature on the response values, and response and recovery time, have been studied. It has been shown that response magnitude slightly depends on humidity, but at 100% humidity response time and signal recovery time increase significantly. A sufficiently high degree of selectivity has been found when detecting oxygen, in comparison with other analyte gases (CO, H-2, CH4 and CO2).