Heterobimetallic Sodium Rare-Earth Complexes: "Third-Generation" MOCVD Precursors for the Deposition of NaREF4 (RE = Y, Gd) Films

Battiato S; Rossi P; Paoli P; Malandrino G

Inorganic Chemistry, Vol.57, No.24, 15035-15039, 2018

DOI10.1021/acs.inorgchem.8b02267 Export Citation

Heterobimetallic Sodium Rare-Earth Complexes: "Third-Generation" MOCVD Precursors for the Deposition of NaREF4 (RE = Y, Gd) Films

Battiato S, Rossi P, Paoli P, Malandrino G

We report the synthesis of novel hetero-bimetallic precursors of the formula [RE(hfa)(4)](-)[Na center dot tetraglyme](+) [RE = Y, Gd; Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme = 2,5,8,11,14-pentaoxapentadecane], which can be efficiently used as a single source for the metal-organic chemical vapor deposition of NaREF4 films.