In contrast to Indium droplets the usage of Ga or Al droplets for the local droplet etching (LDE) technique is well established. It has been shown previously that In-droplets or In-alloys can be used for LDE with focus on small hole-depths at low etching temperatures. With our recent experiments we reveal that In-LDE is also well suited for the creation of very deep nanoholes (exceeding 100 nm) and very low densities in the range of 10(6) cm(-2) for large average distances of several micrometers. The unexpected high thermal stability of the etching process itself as well as the formed wall-like structures clearly points to an intermixing between etching and substrate material during the LDE-process. This can be related to the lack of As during LDE. Additional experiments with capping layers also reveal high surface-roughness probably caused by a lattice mismatch, which can be also explained by intermixing. A second LDE step with Al can be applied to avoid roughening effects.