The improving of the crystal quality and pronounced enhancement of photoluminescence intensity from beta-FeSi(2)were achieved by pre-coaling silver (Ag) layers on Si(1 0 0) substrates. A modified-Si surface, which formed during the healing step before beta-FeSi2 deposition due to Ag diffusion, was reconstructed the surface into domain structure that minimize the strain caused by lattice matching of beta-FeSi(2 )and Si. This mechanism led to the formation of beta-FeSi2 film with very low levels of density of non-radiative recombination centers, and led to the pronounced enhancement of PL intensity.