SrTiO3 (STO) film was prepared on quartz glass by laser chemical vapor deposition at a deposition temperature (T-dep) ranged from 760 to 1104 K. Effect of the T-dep on the orientation, crystallinity, texture, and microstructure of the STO film was investigated. As the T-dep was increased, the preferred orientation of the STO film tended to be (110)-orientated with corresponding texture coefficient (TC) on the (110) reflection enhanced from 2.3 to 6; meanwhile, the full width at half maximum of the -scan on the (110) reflection decreased from 0.85 degrees to 0.59 degrees. The (110)-oriented grains were in wedge shape about 60 x 150 nm in size, which tended to be flat at an elevated T-dep of 1104 K.