This study examined the variations of the surface roughness and adhesion forces of microelectromechanical systems (MEMS) caused by altering the thickness of the coating. For this purpose, gold and silver coatings were employed in order to study the surface adhesion effects. The deposition method of thermal evaporation was used to coat the layers. To this end, some samples with a silicon substrate were considered and the surface imaging was performed using atomic force microscope (AFM). Then, the obtained data were analyzed and the surface force interaction was calculated for each sample through Rabinovich theoretical model. In view of the repulsive force, compared to the uncoated silicon surface, it was found that both silver and gold depositions with different thicknesses caused increased surface repulsive force, or reduced adhesion force. The results further indicated that the different coating thicknesses of silver for raising the repulsive force were relatively more effective when compared with the gold deposition. This feature could be useful for reducing the adhesion forces in micro-actuators during micro-assembly.