Korean Journal of Materials Research, Vol.29, No.12, 804-811, December, 2019
블록 공중합체 3차원 패턴의 제조 방법 및 그 구조 특성
Fabrication of Free-Standing Three-Dimensional Block Copolymer Patterns on Substrate
E-mail:
As the importance of three-dimensiona (3D) nano patterns and structures has recently emerged, interest in the study of 3D structures of block copolymers has increased. However, most existing studies on block copolymer 3D patterns on substrates are limited to simple 3D structures such as a multi-layered forms. In this study, we propose an experimental method for realizing free-standing 3D block copolymer patterns on substrates using an e-beam lithographic template and film transfer method. The block copolymer 3D structure formed in wide hole templates are similar to simple multi-layered structures; however, as the width of the hole template become narrower, more complex block copolymer 3D structures are formed in which the upper and lower layer structures are interconnected. Furthermore, we introduce a method to fabricate novel block copolymer structures in which the 2D planar structures are connected to 3D complex structures. Proposed 3D block copolymer fabrication method provides a framework for generation of unconventional 3D structures of block copolymer, which can be useful for next generation 3D devices.
- Young WS, Kuan WF, Epps TH, J. Polym. Sci. B: Polym. Phys., 52(1), 1 (2014)
- Jeong CK, Baek KM, Niu S, Nam TW, Hur YH, Park DY, Hwang GT, Byun M, Wang ZL, Jung YS, Lee KJ, Nano Lett., 14, 7031 (2014)
- Herr DJC, J. Mater. Res., 26, 122 (2011)
- Kim HC, Park SM, Hinsberg WD, Chem. Rev., 110(1), 146 (2010)
- Hagglund C, Zeltzer G, Ruiz R, Thomann I, Lee HBR, Brongersma ML, Bent SF, Nano Lett., 13, 3352 (2013)
- Cha SK, Mun JH, Chang T, Kim SY, Kim JY, Jin HM, Lee JY, Shin J, Kim KH, Kim SO, ACS Nano, 9, 5536 (2015)
- Nunes SP, Car A, Ind. Eng. Chem. Res., 52(3), 993 (2013)
- Uehara H, Kakiage M, Sekiya M, Sakuma D, Yamonobe T, Takano N, Barraud A, Meurville E, Ryser P, ACS Nano, 3, 924 (2009)
- Ji S, Wan L, Liu CC, Nealey PF, Prog. Polym. Sci, 54-55, 76 (2016)
- Cummins C, Ghoshal T, Holmes JD, Morris MA, Adv. Mater., 28(27), 5586 (2016)
- Luo M, Epps TH, Macromolecules, 46(19), 7567 (2013)
- Yu B, Sun P, Chen T, Jin Q, Ding D, Li B, Shi AC, Phys. Rev. Lett., 96, 138306 (2006)
- Yu B, Li B, Jin Q, Ding D, Shi AC, Soft Matter, 7, 10227 (2011)
- Bezik CT, Garner GP, de Pable JJ, Macromolecules, 51(7), 2418 (2018)
- Higuchi T, Tajima A, Motoyoshi K, Yabu H, Shimomura M, Angew. Chem.-Int. Edit., 47, 8044 (2008)
- Shin JM, Kim MP, Yang H, Ku KH, Jang SG, Youm KH, Yi GR, Kim BJ, Chem. Mater., 27, 6314 (2015)
- Deng R, Liang F, Li W, Yang Z, Zhu J, Macromolecules, 46, 7012 (2013)
- Grundy LS, Lee VE, Li N, Sosa C, Mulhearn WD, Liu R, Register RA, Nikoubashman A, Prud’homme RK, Panagiotopoulos AZ, Priestley RD, ACS Nano, 12, 4660 (2018)
- Rose F, Bosworth J, Dobisz E, Ruiz R, Nanotechnology, 22, 350603 (2011)
- Kim JY, Kim BH, Hwang JO, Jeong SJ, Shin DO, Mun JH, Choi YJ, Jin HM, Kim SO, Adv. Mater., 25(9), 1331 (2013)
- Jeong JW, Park WI, Do LM, Park JH, Kim TH, Chae G, Jung YS, Adv. Mater., 24(26), 3526 (2012)
- Rahman A, Majewski PW, Doerk G, Black CT, Yager KG, Nat. Commun., 7, 13988 (2016)
- Manners I, Register RA, Davis RL, Nunns A, Kim SY, Gwyther J, Chaikin PM, Nano Lett., 14, 5698 (2014)
- Cha SK, Yong D, Yang GG, Jin HM, Kim JH, Han KH, Kim JU, Jeong SJ, Kim SO, ACS Appl. Mater. Interfaces, 11, 20265 (2019)
- Kim JY, Kim BH, Hwang JO, Jeong SJ, Shin DO, Mun JH, Choi YJ, Jin HM, Kim SO, Adv. Mater., 25(9), 1331 (2013)
- Wu NLY, Zhang X, Murphy JN, Chai J, Harris KD, Buriak JM, Nano Lett., 12, 264 (2012)
- Sundrani D, Darling SB, Sibener SJ, Nano Lett., 4, 273 (2004)
- Yabu H, Higuchi T, Jinnai H, Soft Matter, 10, 2919 (2014)
- Yang SY, Ryu I, Kim HY, Kim JK, Jang SK, Russell TP, Adv. Mater., 18(6), 709 (2006)
- Chai J, Wang D, Fan XN, Buriak JM, Nat. Nanotechnol., 2(8), 500 (2007)
- Materials N, Synthesis SI, Templates BC, ACS Nano, 5, 4600 (2011)