The morphology of palladium particles supported on both highly oriented pyrolytic graphite (HOPG) and glassy carbon was studied using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The particles on the HOPG were linked with neighboring particles to agglomerate, while the particles on the glassy carbon were circular. AFM data with tapping mode for the palladium particles on HOPG were consistent with the high-resolution SEM image. Although the lateral resolution of the AFM image was lower than that for the high-resolution SEM data, the AFM image clearly indicated the height distribution of the agglomerates.